Theory of SAW Gas Sensor based on Bi-layer Conductivity Changes
نویسندگان
چکیده
منابع مشابه
High Temperature SAW Gas Sensor on Langasite
Novel Surface Acoustic Wave (SAW) devices using the new langasite (LGS) family of crystals have been designed, fabricated, and tested for high temperature (up to 750°C) gas sensor applications. The devices were fabricated using platinum (Pt) and palladium (Pd) thin film technology and were mounted in a high temperature sealed stainless steel chamber for gas testing. The high temperature SAW sen...
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Novel surface acoustic wave (SAW) devices using the recent langasite (LGS) family of crystals have been designed, fabricated, and tested for high temperature (up to 750 ◦C) gas sensor applications. The devices were fabricated using platinum (Pt) and palladium (Pd) thin film technology as electrodes and sensing films to withstand temperatures in excess of 1000 ◦C. Combinations of platinum and pl...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2012
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.09.390